Nidec Sankyo LCD panel handling robot

The thin film processing, vapor deposition and other processes of mother glass substrates require extremely high cleanliness vacuum environments, therefore, robots handling mother glass substrates must also have the ability to withstand vacuum environments.

Robots working in a vacuum environment have sealing devices built into each joint to prevent air and dust from escaping from the inside of the robot's gearbox and other components. However, installing a sealing device usually leads to a decrease in the degree of freedom of the movable joint. For this reason, the three vacuum robots adopt magnetic seals integrated with the reducer, which can control the number of seals used to the minimum range, ensuring the same degree of freedom as the atmospheric environment version.

In order to meet the needs of display panel manufacturers, the product line includes two arm types: boomerang and SCARA. Both arm types use interchangeable units, effectively controlling costs.