BROOKS wafer handling robot

Since 1978, Brooks has been a major partner in the global semiconductor manufacturing market.

BROOKS vacuum robot features:

1. Can transport wafers in a vacuum bundling machine;

2. Capable of transporting 300mm wafers;

3. Dual end effectors with patented BiSymmetrik;

4. Advanced firmware that can be used for local and remote monitoring and diagnosis;

5. Compliant with CE and SEMI S2.