BROOKS wafer handling robot
Since 1978, Brooks has been a major partner in the global semiconductor manufacturing market.
BROOKS vacuum robot features:
1. Can transport wafers in a vacuum bundling machine;
2. Capable of transporting 300mm wafers;
3. Dual end effectors with patented BiSymmetrik;
4. Advanced firmware that can be used for local and remote monitoring and diagnosis;
5. Compliant with CE and SEMI S2.